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Gas mixture of fluorine and nitrogen

Item

Index

Fluorine (F2) content (volume fraction) %

(5—20)

Nitrogen (N2) content (volume fraction) %

(95—80)

Oxygen (O2) content (volume fraction) %

≤0.08

carbon tetrafluoride (CF4) content (volume fraction) %

≤0.03

Hydrogen fluoride (HF) content (volume fraction) %

≤0.50

Fujian Shaowu Yongfei Chemical Co., Ltd.
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